报告题目：A General 2-Temperature Thermal Plasma Model for Arc Discharges

演讲人： 周宁博士，中微半导体设备有限公司

时间：2011年5月3日(周二)下午2：00

地点：力学所主楼312会议室

邀请人：孙泉华研究员

报告摘要：

A generalized fluid model that accounts for thermodynamic and chemical departure from equilibrium is proposed for thermal plasmas such as arc discharges over a wide temperature and pressure range. In this model, the thermal non-equilibrium effect is considered by solving the temperature equations for electron and gaseous molecules, respectively. The plasma chemical kinetics is modeled by the finite-rate reactions, and the electron transport coefficients (mobility, diffusivity and electric conductivity) are calculated according to the electron collisions with heavy particles. Quasi-neutrality is assumed for the bulk of plasma and sheath model is employed to account for the near electrode phenomena. This model is validated for arc discharges at near equilibrium conditions, and the comparison with the equilibrium model is discussed. Further application for sub-atmospheric arc jet is also presented.